JPH0446540U - - Google Patents
Info
- Publication number
- JPH0446540U JPH0446540U JP8928590U JP8928590U JPH0446540U JP H0446540 U JPH0446540 U JP H0446540U JP 8928590 U JP8928590 U JP 8928590U JP 8928590 U JP8928590 U JP 8928590U JP H0446540 U JPH0446540 U JP H0446540U
- Authority
- JP
- Japan
- Prior art keywords
- oil passage
- oil
- wafer processing
- wafer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8928590U JPH0446540U (en]) | 1990-08-27 | 1990-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8928590U JPH0446540U (en]) | 1990-08-27 | 1990-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0446540U true JPH0446540U (en]) | 1992-04-21 |
Family
ID=31823163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8928590U Pending JPH0446540U (en]) | 1990-08-27 | 1990-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446540U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156830A (ja) * | 2004-11-30 | 2006-06-15 | Mitsubishi Heavy Ind Ltd | 製膜装置及びその製造方法 |
-
1990
- 1990-08-27 JP JP8928590U patent/JPH0446540U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156830A (ja) * | 2004-11-30 | 2006-06-15 | Mitsubishi Heavy Ind Ltd | 製膜装置及びその製造方法 |
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